(ÁÖ)¿ÍÀÌ¿¥¾¾
- 01±â¾÷Á¤º¸
±â¾÷Á¤º¸
- 02Á¦Ç°Á¤º¸
»ç¾÷¼Ò°³
- 03ÅõÀÚÁ¤º¸
ÅõÀÚÁ¤º¸
- 04ä¿ëÁ¤º¸
ä¿ëÁ¤º¸
- À±¸®°æ¿µ
±â¾÷Á¤º¸
»ç¾÷¼Ò°³
ÅõÀÚÁ¤º¸
ä¿ëÁ¤º¸
ºñ±³¸¦ °ÅºÎÇÏ´Â °æÀï·ÂÀ¸·Î ±â¼úÀ» ¼±µµÇÕ´Ï´Ù.
Target »ç¾÷
°¡°ø Bonding FSW
¿ÍÀÌ¿¥¾¾(ÁÖ)´Â Sputtering °øÁ¤ÀÇ ¹è¼±Àç·Î »ç¿ëµÇ´Â TargetÀ» ´Ù¾çÇÑ ¼ÒÀç ¹× Å©±â·Î ¾ç»êÇÏ°í ÀÖÀ¸¸ç, è¹ö ³» Target ÀåÂø ¹× Cooling ¿ªÇÒÀÇ Backing Plate¸¦ ±¹³» ÃÖÃÊ·Î ±¹»êÈÇÏ¿© ³ôÀº °æÀï·ÂÀ» °®Ãß°í ÀÖ½À´Ï´Ù.
Target°ú Backing Plate°£ Bonding±â¼úÀº ¼ö³â°£ ÃàÀûµÈ ³ëÇϿ츦 ¹ÙÅÁÀ¸·Î ±¹³» ÃÖ´ë Å©±â±îÁö ´ëÀÀ °¡´ÉÇÏ¸ç ´Ù¾çÇÑ ±â¼úÀû Áö¿øÀ» Á¦°øÇÏ°í ÀÖ½À´Ï´Ù.
¹ÝµµÃ¼ ¹× µð½ºÇ÷¹ÀÌ
Cu, Ti, Mo, Ag, Al, Ta, etc
Flat Type, Rotary Type
Flat Type |
Thickness | Width | Length | Rotary Type |
Out diameter | In diameter | Length |
---|---|---|---|---|---|---|---|
5~100 | 3,000 | 4,000 | 100~350 | 50~350 | 4,000 |
°¡°ø, Bonding, Ultrasonic, ¿ëÁ¢(Tig)
- Flat Target -
- Rotary Target -
- Target Bonding -
¹ÝµµÃ¼ ¹× µð½ºÇ÷¹ÀÌ
Cu, Ti, Mo, Ag, Al, Ta, etc
Flat Type, Rotary Type
(´ÜÀ§:mm) | (´ÜÀ§:mm) | ||||||
Flat Type |
Thickness | Width | Length | Rotary Type |
Out diameter | In diameter | Length |
---|---|---|---|---|---|---|---|
10~100 | 3,000 | 4,000 | 100~350 | 50~350 | 4,000 |
°¡°ø, ¿ëÁ¢(FSW), ÈÚ±³Á¤
- Target Bonding -
- Backing Plate -
- Backing Plate -